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UV, DUV focussing lenses(355nm, 266nm, 248nm）

UV, DUV focussing lenses(355nm, 266nm, 248nm）

High resistance and Durability

Designed as the most suitable focusing lenses for laser microfabrication. Lenses are coated with high resistance coating, and assembled with adhesive-free process, so it is ideal for laser microfabrication.
This solution available both for the fabrication of 355nm, 266nm, 248nm.

Applications
  • Dicing
  • Stereolithography
  • Glass marking

355nm, 266nm focusing lens

Features
  • A replaceable window is standard equipped as a measure against scatter during laser fabrication.
    This enables the microfabrication inside the glass by selecting the thickness of the window.
  • THP6-8, FHP6-8 has a small focus spot size, making it ideal for microfabrication.
Specification examples
Model No. THP6-8 FHP6-8 THP50-20 FHP50-20 THP80-20 FHP80-20
Wavelength 355nm 266nm 355nm 266nm 355nm 266nm
Numerical aperture(NA) 0.6 0.2 0.125
Focal length 6.22mm 50mm 80mm
Focus spot area Φ0.01mm Φ0.5mm Φ0.8mm
Focus spot size ≦Φ1μm ― ー
Working distance 3.3mm 45mm 73mm
Mounting threads W20.32x36threads/in M34xP0.75 M34xP0.75
Window Available/Replaceable None None
Dimensions
 
THP6-8, FHP6-8
THP6-8
THP50-20, 80-20
FHP50-20, 80-20
THP50-20,80-20

248nm focusing lens

Features
  • Simultaneous observation of processing points is possible by achromatizing excimer laser (248nm) and FHG-YAG laser (266nm) and visible light (480nm to 650nm).
  • Easily processed just by attaching to a microscope.
  • The mask imaging magnification is changeable by combining with a relay lens.
Specification examples
Model No. KVH20-8 KVH40-9.6 KV100-25 KV200-25
Wavelength 248nm,266nm,
480～650nm		 248nm,
480～650nm		 248nm,
480～651nm
Numerical aperture(NA) 0.2 0.12 0.125 0.06
Focal length 20mm 40mm 100mm 200mm
Focus spot area Φ0.5mm Φ2mm Φ2mm Φ4mm
Theorical resolution 1μm 2μm 3μm ―
Working distance 10.2mm 24mm 70mm 192mm
Mounting threads W26×36threads/in W26×36threads/in M32×0.75 M32×0.75
Window Available/Replaceable Available/Replaceable None None
Dimensions
KVH20-8
KVH20-8
KVH40-9.6
KVH40-9.6
KV100-25
KV100-25
Magnification table
　 Relay lens
KH200
R-22		 KH400
R-22		 K400
R-36		 K600
R-36		 K800
R-36
Focusing lens KVH20-8 1/10 1/20 ー ー ー
KVH40-9.6 1/5 1/10 ー ー ー
KV100-25 ー ー 1/4 1/6 1/8

Catalog Download

266n, 355nm focus lens for laser processing(pdf, 232KB)
Objective lenses for excimer laser processing (pdf, 289KB)