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High NA UV Objective lens (Adhesive - Free)

High NA UV Objective lens (Adhesive - Free)

High NA Objective lens (for YAG laser)

High NA makes the focused spot diameter small, and the high resistance coating makes it possible to use under a high power laser.
Also adhesive-free products are available. This adhesive-free products reduce and minimize the outgas to the utmost limit.

Key features

Features

For 405nm, 355nm and 266nm（each exclusive)
Small focus spot diameter from high NA
High resitance coating allows high-power laser use
Adhesive-free products reduce outgas to the utmost limit

Applications

High resolution imaging e.g. on semiconductor, advanced packaging and flat panel display applications
Laser microfabrication by submicron level

CA266-4085 and CA355-4085 are adhesive-free products.

Specification examples

Model No.	CA266-4085 ST266-4085	CA355-4085 ST355-4085	CA405-4085 ST405-4085
Wavelength	266nm	355nm	405nm
Numerical aperture(NA)	0.85
Focal length	4mm
Transmittance	≧85%
Field of view	Φ0.45mm
Theorical resolution ※1	0.19um	0.25um	0.29um
Focus spot size ※2	Φ0.20um	Φ0.27um	Φ0.30um
Working distance	1mm
Parfocal length	60mm
Outer diameter	CA：Φ45mm ST：Φ39mm
Mounting threads	M25×0.75