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(Developing) DUV Catadioptric Objective
Kyocera SOC Corporation is pleased to announce the release of our new product, "DUV catadioptric objective”.
Having been the leading supplier of high NA objective lenses over Deep Ultraviolet(DUV) spectral ranges, we are here to introduce another type of objective lens to our lineup. Our new product HK266-15-4085 has adopted "catadioptric design" to break the conventional limits and it will surely extend the variety of system constructions with DUV light sources.
※This product is under development.
※The contents of this document are subject to change without notice. Contact us for further information
Key features
- Features
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- The catadioptric design provides sufficient chromatic corrections over broad spectral ranges(266±15nm).
- The catadioptric objective is suitable for DUV lamps or LED based systems.
- Applications
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- High resolution imaging in semiconductor inspection, DUV Raman spectroscopy, photoluminescence, etc.
- Advanced bioimaging applications using DUV light sources.
Specification examples
| Item | HK266-15-4085 |
| Wavelength | 266±15nm |
| Numerical aperture (NA) | 0.85 |
| Focal length | -4.0mm※ |
| Field of view | Φ0.3mm |
| Working distance | 0.1mm |
| Parfocal length | 60mm |
| Obsculation | <20% |
| Mass | Approx.530g |
※The focal length is represented negative because the objective forms an intermediate image.
Dimensions
- (Developing) DUV Catadioptric Objective
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- (Developing) DUV Catadioptric Objective