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Optical units (Technical information)
Architect optical systems that suit your needs
Integrated in-house design and fabrication of lens system and optical system
KYOCERA SOC Corporation covers a broad range of technology platforms over all necessary processes such as design, optics manufacturing, system fabrication and inspection so as to be able to realize an ideal optical system pursuant to customers' requests and needs. Operation is full-line customized, from design to inspection services covering from a single lens or several elementary lenses to a complex optical system made of a few thousand of parts and components, from VUV to far infrared region.
Introduction to Optical System Design and Manufacturing PDF (376KB)
Temperature Change Resistant Titanium Objective Lens PDF (477KB)
Long working distance immersion objective PDF (660KB)
Super Long working distance immersion objective PDF (285KB)
Development Results of Optics PDF (537KB)
Objective lenses for semiconductor mask and wafer inspection PDF (322KB)(2022.05.25 update)
High NA UV Objective lens PDF (310KB)(2022.05.25 update)
High NA UV Objective lens(No adhesive used) PDF (349KB)(2022.05.25 update)
F-theta lens for laser processing(YAG laser) PDF (335KB)(2022.05.25 update)
F-theta lens for laser processing(Fiber laser) PDF (275KB)(2022.05.25 update)
266n, 355nm focus lens for laser processing PDF (232KB)(2023.05.18 update)
Objective lenses for excimer laser processing PDF (283KB)
(Developing) DUV Catadioptric Objective PDF (128KB)
Consulting-typed development backed by fabrication and evaluation technologies
KYOCERA SOC Corporation offers solution-provider-typed consulting and manufacturing services in which sometimes consider and work up target specifications based on the customer's images and kick around subsequent challenges together, or sometimes originally design and develop customized optical alignment, jig and tool for inspection and evaluation. KYOCERA SOC Corporation has track records in developing optical systems together with clients, which are used under specific environment such as water pressure-proof or radiation-proof.
A wide range of evaluation technologies
【Analysis】
Imaging performance
Illumination uniformity
Coating characteristics
Stray light analysis
Flare analysis
Structure analysis
【Mesurement】
Wave aberration
Focus spot
MTF
Temperature test
Vibration test
DUV optical system
Optical systems which are used for DUV wavelengths shorter than 300nm need to keep an eye on various considerations. KYOCERA SOC Corporation is able to take appropriate countermeasures based on its abundant development and manufacturing experiences for instance:
Vitreous material selection
Outgassing provision
High tolerance optical system design
Wavefront measurement with unique UV interferometer
etc.
KYOCERA SOC Corporation also has optical system design and fabrication track records for even shorter than DUV wavelength regions:
266nm
248nm
213nm
193nm
157nm
High precision objective lenses (high NA, wide view angle)
Integrated total manufacturing process design capability in which put various well-considered ideas and fabrication know-hows to realize target specifications is dispensable for precision objective lens development, including lens design, structural design capabilities and related tolerance analysis and structural dissection evaluation capabilities. KYOCERA SOC Corporation designs and develops precision objective lenses by designing its manufacturing to take full advantages of the entire processes such as:
High precision lens processing (～λ/50)
High damage resistant coating
Broadband coating
High precision mechanical component processing (～1μm)
Centering processing (～1arcsec.)
Low distortion assembly (～λ/100)
Eccentricity measurement
Focus and image adjustment
Performance simulation
Wavefront aberration evaluation (～λ/100)
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