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Polishing technology

Polishing technology

Polishing technology

In the course of development of optical coating for high power laser, KYOCERA SOC Corporation has also developed super polishing processes which can suppress surface roughness and remove residual abrasive from the polished surface. This polishing process allows KYOCERA SOC Corporation to drastically increase laser durabiliry of optically transmissive component such as windows or polarizers. Nowadays, super-polishing technpology is also useful for fabrication of ultra low-loss mirror. In 2004, KYOCERA SOC Corporation launched the development of large diameter high-precision spherical lenses and installed cutting edge fablication equipment including MRF and SSI. Nowadays, KYOCERA SOC Corporation focuses on high precision aspheric lenses or mirrors.

Polishing

MRF (Magneto-Rheological Finishing)

KYOCERA SOC Corporation has introduced a number of MRF machines to correct surface figure errors tailored to customers' specifications. It can support surface figure irregularity up to λ/50, outer diameter up to Φ300mm. MRF is revolutionary optical technology in which a given amount of magnetic viscoelastic fluid is flown into a rotatory wheel to maintain constant amount of polishing and to conduct high-precision polishing.
Automatically generated NC program enables high-precision processing.

Polising material examples
Various glass materials including synthetic quartz, calcium fluoride crystal, etc.
Processability is subject to material because of the chance to generate magnetic field.

※ MRF machine (left) / Actual polishing (right)

Polising material examples
  • Various glass materials including synthetic quartz, calcium fluoride crystal, etc.
  • Processability is subject to material because of the chance to generate magnetic field.

Measurement and evaluation

SSI (Subaperture Stitching Interferometer)

Although it has been difficult for traditional technology to measure profile irregularity all over the large-diameter lens or high-NA lens, Subaperture Stitching Interferometer (SSI) developed by QED Technologies is able to measure the entire surface of the target object with several tenths of λ or less in its precision level. Being focused on the technology earlier, KYOCERA SOC Corporation adopted this equipment to guarantee high accuracy of several tenths of λ or less for the profile irregularity on the entire surface of any optically finished product.

Measurement and evaluation
Measurement and evaluation

NewView

KYOCERA SOC Corporation introduces a non-contact, microscope-typed, surface roughness measuring equipment (New View) to which Zygo's cutting-edge white-light interferometry technology is applied. Surface roughness of polished product has a major impact on DUV optical performance such as transmissivity, optical contrast, and laser durability. That is reason why KYOCERA SOC Corporation pays much attention to it as a key quality control factor.

Measurement and evaluation